Manufacturers of Flow Control Solutions for Semiconductor and Fab Equipment

Manufacturing is defined as the process in which raw materials (the “input”) are converted into finished products (the “output”).

Semiconductor Manufacturing comprises of input materials such as dopants, metals, semiconductor materials, and insulators, resulting in output materials of ICs, printed circuit boards, IC packages, and several other electronic systems and products such as digital cameras, computers, and cellular phones. Processes used in semiconductor manufacturing include oxidation, etching, crystal growth, planarization, deposition processes, and photolithography.

Flow Control in Semiconductor Manufacturing Equipment

Proteus produces flow control solutions used in the semiconductor industry and vital to the repeatability, manufacturing, and capability of integrated circuits. In the semiconductor industry today, there are a few dominant flow control solutions.

Thermal bases flow control solution is the most common of these. MEMS-based and Coriolis sensors are not currently employed for semiconductor applications, but will become useful for such as continued advancement ushers in faster, smaller, and more innovative fluid handling components. In addition, the trend towards batch process instead of single wafers has influenced the creation of components used in traditional gas systems.

Performance requirements have not yet been developed for mass flow control in the semiconductor industry; applied materials have specifications for testing and defining the requirements. These tests best duplicate the behavior of gas which is trying to enter into a wafer process chamber.

Surrogate gasses, normally referred to as calibration gases, are used to best duplicate the nameplate gas. Understanding the relationship of calibration gases to the nameplate gas is essential to calibrate a mass flow control. Relationships can be expressed as nonlinear, polynomial equations which are created to best fit the function of this relationship. The relationships of nitrogen with all the gases should also be considered, so that testing of mass flow control in semiconductor equipment can be completed before shipment and installation in the fab.

Performance evaluation is extremely important for understanding which mass flow control system is best for a particular semiconductor process. Preliminary testing allows interactive development of mass flow control with the instrument manufacturers. improvements in diagnostics, digital communication, and calibration have improved the capability of mass flow control and allow process control methods to be applied. This process allows for the continuous improvements necessary in the development of semiconductor processes.

The semiconductor manufacturing process includes a stage in which a program delivers a process gas to the tool and defines flow for a time period. This rate of flow is obtained by a mass flow controller, which is supplied with gas at a controlled pressure. The delivery of gas for semiconductor manufacturing by using a flow control system is possible in a flow mode for delivering a batch and, likewise, in a no-flow mode.

The Market for Mass Flow Control (MFC)

The market for water, air, fluid, and gas control and treatment will rise to $493 billion in 2017; this is not only due to an expansion of the word economy, but also a response to new regulatory developments and the rise of new technologies and industries. Product launches, partnerships, and increasing demand for mass controllers in the semiconductor industry all contribute to the growth of this market.

Between 2018 and 2023, the MFC market is expected to grow at a CAGR of %5.5.

Market increase from USD 1,119.5 million to USD 1,495.1 million is expected by 2022.

Proteus Industries MFC Products

We offer a full line of instruments and flow control solutions for the growing semiconductor and fabrication equipment industry:

  • WeldSaver 3– DeviceNet and Vortex Flow Sensors.
  • WeldSaver 3- DeviceNet and Discrete I/O.
  • WeldSaver 5 & 6.

Our products are manufactured in Mountain View, California.

Click here to learn about our five-year warranty.

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